Frequency softening of an electrostatically actuated beam
Author
Parmeshwar Prasad
Date
Nov 29, 2014 2:53:53 AM
Company
CeNSE
Version
3
Summary
Frequency softening of an electrostatically actuated fixed-fixed Silicon
Nitride beam structure is studied.
Contents
Parameters
Name
|
Expression
|
Description
|
W1
|
1[um]
|
width
|
L1
|
10[um]
|
length of the beam
|
L2
|
40[um]
|
length of the pads
|
W2
|
1[um]
|
width of the pads
|
T1
|
1[um]
|
thickenss of the beam and substrate
|
T2
|
2[um]
|
thickness of the pads
|
Vdc
|
200[V]
|
DC Voltage appliead
|
Selection
|
Boundaries 23–26, 35, 38, 52–55, 66, 69
|
Selection
|
Boundaries 9–12, 14, 16, 74–77, 79, 81
|
Selection
|
Domains 2, 4–5, 7–10, 12–13
|
Selection
|
Domains 3, 6, 11, 14
|
Coordinate system type
|
Boundary system
|
Identifier
|
sys1
|
Geometry 1
Units
Length unit
|
µm
|
Angular unit
|
deg
|
Air
Selection
Geometric entity level
|
Domain
|
Selection
|
Domain 1
|
Poly-Si
Selection
Geometric entity level
|
Domain
|
Selection
|
Domains 3, 6, 11, 14
|
Si3N4
Selection
Geometric entity level
|
Domain
|
Selection
|
Domains 2, 4–5, 7–10, 12–13
|
Electromechanics
Features
Free Deformation 1
|
Electrical Material Model 1
|
Zero Charge 1
|
Free 2
|
Electromechanical Interface 1
|
Prescribed Mesh Displacement 1
|
Linear Elastic Dielectric 1
|
Initial Values 1
|
Linear Elastic Material 1
|
Fixed Constraint 1
|
Fixed Mesh 2
|
Electric Potential 1
|
Electric Potential 2
|
Mesh 1
Parameter name: Vdc
Parameters:
Solution
Name
|
Value
|
Solution
|
Solver 1
|
Component
|
Save Point Geometry 1
|
Data set: Solution 1
Solution
Name
|
Value
|
Solution
|
Store Solution 2
|
Component
|
Save Point Geometry 1
|
Data set: Solution 2
Solution
Name
|
Value
|
Solution
|
Parametric 3
|
Component
|
Save Point Geometry 1
|
Data set: Solution 3
Data
Name
|
Value
|
Data set
|
Solution 3
|
Expression
Name
|
Value
|
Expression
|
emi.freq
|
Unit
|
Hz
|
Description
|
Frequency
|
Interactive 3D values
Global Evaluation 1 (emi.freq)
Table 1
Vdc
|
Frequency (Hz)
|
0
|
5.279e6
|
50
|
5.26937e6
|
100
|
5.24075e6
|
150
|
5.19399e6
|
200
|
5.13047e6
|
250
|
5.05203e6
|
300
|
4.96082e6
|
350
|
4.85899e6
|
400
|
4.74816e6
|
Vdc(4)=150 Eigenfrequency=5.193995e6 Surface: Total displacement (µm)
Vdc(4)=150 Eigenfrequency=5.193995e6 Slice: Electric potential (V) Streamline: Displacement field (Material) Contour: Electric potential (V)