Testing the simulation code before the actual simulation

titleimage.png

Author

Parmeshwar Prasad

Date

Nov 29, 2014 12:14:14 AM

Company

CeNSE

Version

2.0

Summary

This simulation is to verify the simulation steps using experimental data published by Frank D. Bannon et al (IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 35, NO. 4, APRIL 2000 ). The simulation is done with slight changes in the device dimension mentioned in the paper.

Contents
1. Global Definitions
1.1. Parameters 1
2. Component 1 (comp1)
2.1. Definitions
2.2. Geometry 1
2.3. Materials
2.4. Electromechanics (emi)
2.5. Mesh 1
3. biased
3.1. Parametric Sweep
3.2. Stationary
3.3. Eigenfrequency
4. Results
4.1. Data Sets
4.2. Derived Values
4.3. Tables
4.4. Plot Groups

1. Global Definitions

1.1. Parameters 1

Parameters
Name Expression Description
Vdc 40[V] dc bias

2. Component 1 (Comp1)

2.1. Definitions

2.1.1. Selections

Resonator
Selection type
Explicit
Selection
Domains 4–5, 8
Resonator Boundary
Selection type
Adjacent
Selection
Boundaries 8–10, 12–13, 15, 21–22, 24, 26
Drive Electrode
Selection type
Explicit
Selection
Domain 7
Drive Eletrode Boundary
Selection type
Adjacent
Selection
Boundaries 16–19

2.1.2. Coordinate Systems

Boundary System 1
Coordinate system type Boundary system
Identifier sys1

2.2. Geometry 1

geom_geom1.png

Geometry 1

Units
Length unit µm
Angular unit deg

2.3. Materials

2.3.1. Poly-Si

materialmat1.png

Poly-Si

Selection
Geometric entity level Domain
Selection Domains 4–5, 7–8

2.3.2. Si3N4

materialmat2.png

Si3N4

Selection
Geometric entity level Domain
Selection Domain 2

2.3.3. SiO2

materialmat3.png

SiO2

Selection
Geometric entity level Domain
Selection Domain 1

2.3.4. Air

materialmat4.png

Air

Selection
Geometric entity level Domain
Selection Domains 3, 6

2.4. Electromechanics (Emi)

physics_emi.png

Electromechanics

Features
Free Deformation 1
Electrical Material Model 1
Zero Charge 1
Free 2
Electromechanical Interface 1
Prescribed Mesh Displacement 1
Linear Elastic Dielectric 1
Initial Values 1
Fixed Constraint 3
Fixed Mesh 2
Electric Potential 1
Electric Potential 2
Electric Potential 3

2.5. Mesh 1

mesh_mesh1.png

Mesh 1

3. Biased

3.1. Parametric Sweep

Parameter name: Vdc

Parameters:

3.2. Stationary

Study settings
Property Value
Include geometric nonlinearity On
Mesh selection
Geometry Mesh
Geometry 1 (geom1) mesh1
Physics selection
Physics Discretization
Electromechanics (emi) physics

3.3. Eigenfrequency

Study settings
Property Value
Include geometric nonlinearity On
Mesh selection
Geometry Mesh
Geometry 1 (geom1) mesh1
Physics selection
Physics Discretization
Electromechanics (emi) physics

4. Results

4.1. Data Sets

4.1.1. Solution 1

Solution
Name Value
Solution Solver 1
Component Save Point Geometry 1

dataset_dset1.png

Data set: Solution 1

4.1.2. Solution 2

Solution
Name Value
Solution Store Solution 2
Component Save Point Geometry 1

dataset_dset2.png

Data set: Solution 2

4.1.3. Solution 3

Solution
Name Value
Solution Parametric 3
Component Save Point Geometry 1

dataset_dset3.png

Data set: Solution 3

4.2. Derived Values

4.2.1. Global Evaluation 1

Data
Name Value
Data set Solution 3
Expression
Name Value
Expression emi.freq
Unit Hz
Description Frequency

4.3. Tables

4.3.1. Table 2

Global Evaluation 1 (emi.freq)

Table 2
Vdc Frequency (Hz)
0 1.65862e7
20 1.65814e7
40 1.65671e7
60 1.65431e7
80 1.6509e7
100 1.64645e7
120 1.6409e7
140 1.63418e7
160 1.62619e7
180 1.61681e7
200 1.60589e7

4.4. Plot Groups

4.4.1. Electric Potential (Emi)

plotgroup_pg1.png

Vdc(11)=200 Eigenfrequency=1.60589e7 Surface: Electric potential (V) Contour: Electric potential (V) Arrow Surface: Displacement field (Material)

4.4.2. Displacement (Emi)

plotgroup_pg2.png

Vdc(11)=200 Eigenfrequency=1.60589e7 Surface: Displacement field, X component (µm)

4.4.3. 1D Plot Group 3

plotgroup_pg3.png