Testing the simulation code before the actual simulation

#### Author

Parmeshwar Prasad

#### Date

Nov 29, 2014 12:14:14 AM

#### Company

CeNSE

#### Version

2.0

### Summary

This simulation is to verify the simulation steps using experimental data published by Frank D. Bannon et al (IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 35, NO. 4, APRIL 2000 ). The simulation is done with slight changes in the device dimension mentioned in the paper.

Contents

1. |  | Global Definitions
1.1. |  |  | Parameters 1
2. |  | Component 1 (comp1)
2.1. |  |  | Definitions
2.2. |  |  | Geometry 1
2.3. |  |  | Materials
2.4. |  |  | Electromechanics (emi)
2.5. |  |  | Mesh 1
3. |  | biased
3.1. |  |  | Parametric Sweep
3.2. |  |  | Stationary
3.3. |  |  | Eigenfrequency
4. |  | Results
4.1. |  |  | Data Sets
4.2. |  |  | Derived Values
4.3. |  |  | Tables
4.4. |  |  | Plot Groups

## 1. Global Definitions

### 1.1. Parameters 1

Parameters
Name | Expression | Description
--- | --- | ---
Vdc | 40[V] | dc bias

## 2. Component 1 (Comp1)

### 2.1. Definitions

#### 2.1.1. Selections

##### Resonator

Selection type
Explicit

Selection
Domains 4–5, 8

##### Resonator Boundary

Selection type
Adjacent

Selection
Boundaries 8–10, 12–13, 15, 21–22, 24, 26

##### Drive Electrode

Selection type
Explicit

Selection
Domain 7

##### Drive Eletrode Boundary

Selection type
Adjacent

Selection
Boundaries 16–19

#### 2.1.2. Coordinate Systems

##### Boundary System 1

Coordinate system type | Boundary system
Identifier | sys1

### 2.2. Geometry 1

Geometry 1

Units
Length unit | µm
Angular unit | deg

### 2.3. Materials

#### 2.3.1. Poly-Si

Poly-Si

Selection
Geometric entity level | Domain
Selection | Domains 4–5, 7–8

#### 2.3.2. Si3N4

Si3N4

Selection
Geometric entity level | Domain
Selection | Domain 2

#### 2.3.3. SiO2

SiO2

Selection
Geometric entity level | Domain
Selection | Domain 1

#### 2.3.4. Air

Air

Selection
Geometric entity level | Domain
Selection | Domains 3, 6

### 2.4. Electromechanics (Emi)

Electromechanics

Features
Free Deformation 1
Electrical Material Model 1
Zero Charge 1
Free 2
Electromechanical Interface 1
Prescribed Mesh Displacement 1
Linear Elastic Dielectric 1
Initial Values 1
Fixed Constraint 3
Fixed Mesh 2
Electric Potential 1
Electric Potential 2
Electric Potential 3

### 2.5. Mesh 1

Mesh 1

## 3. Biased

### 3.1. Parametric Sweep

Parameter name: Vdc

Parameters:

### 3.2. Stationary

Study settings
Property | Value
--- | ---
Include geometric nonlinearity | On

Mesh selection
Geometry | Mesh
--- | ---
Geometry 1 (geom1) | mesh1

Physics selection
Physics | Discretization
--- | ---
Electromechanics (emi) | physics

### 3.3. Eigenfrequency

Study settings
Property | Value
--- | ---
Include geometric nonlinearity | On

Mesh selection
Geometry | Mesh
--- | ---
Geometry 1 (geom1) | mesh1

Physics selection
Physics | Discretization
--- | ---
Electromechanics (emi) | physics

## 4. Results

### 4.1. Data Sets

#### 4.1.1. Solution 1

Solution
Name | Value
--- | ---
Solution | Solver 1
Component | Save Point Geometry 1

Data set: Solution 1

#### 4.1.2. Solution 2

Solution
Name | Value
--- | ---
Solution | Store Solution 2
Component | Save Point Geometry 1

Data set: Solution 2

#### 4.1.3. Solution 3

Solution
Name | Value
--- | ---
Solution | Parametric 3
Component | Save Point Geometry 1

Data set: Solution 3

### 4.2. Derived Values

#### 4.2.1. Global Evaluation 1

Data
Name | Value
--- | ---
Data set | Solution 3

Expression
Name | Value
--- | ---
Expression | emi.freq
Unit | Hz
Description | Frequency

### 4.3. Tables

#### 4.3.1. Table 2

Global Evaluation 1 (emi.freq)

Table 2
Vdc | Frequency (Hz)
--- | ---
0 | 1.65862e7
20 | 1.65814e7
40 | 1.65671e7
60 | 1.65431e7
80 | 1.6509e7
100 | 1.64645e7
120 | 1.6409e7
140 | 1.63418e7
160 | 1.62619e7
180 | 1.61681e7
200 | 1.60589e7

### 4.4. Plot Groups

#### 4.4.1. Electric Potential (Emi)

Vdc(11)=200 Eigenfrequency=1.60589e7 Surface: Electric potential (V) Contour: Electric potential (V) Arrow Surface: Displacement field (Material)

#### 4.4.2. Displacement (Emi)

Vdc(11)=200 Eigenfrequency=1.60589e7 Surface: Displacement field, X component (µm)

#### 4.4.3. 1D Plot Group 3