Testing the simulation code before the actual simulation
Author
Parmeshwar Prasad
Date
Nov 29, 2014 12:14:14 AM
Company
CeNSE
Version
2.0
Summary
This simulation is to verify the simulation steps using experimental data published by Frank D. Bannon et al (IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 35, NO. 4, APRIL 2000 ). The simulation is done with slight changes in the device dimension mentioned in the paper.
Contents
Parameters
Name
|
Expression
|
Description
|
Vdc
|
40[V]
|
dc bias
|
Selection
|
Boundaries 8–10, 12–13, 15, 21–22, 24, 26
|
Selection
|
Boundaries 16–19
|
Coordinate system type
|
Boundary system
|
Identifier
|
sys1
|
Geometry 1
Units
Length unit
|
µm
|
Angular unit
|
deg
|
Poly-Si
Selection
Geometric entity level
|
Domain
|
Selection
|
Domains 4–5, 7–8
|
Si3N4
Selection
Geometric entity level
|
Domain
|
Selection
|
Domain 2
|
SiO2
Selection
Geometric entity level
|
Domain
|
Selection
|
Domain 1
|
Air
Selection
Geometric entity level
|
Domain
|
Selection
|
Domains 3, 6
|
Electromechanics
Features
Free Deformation 1
|
Electrical Material Model 1
|
Zero Charge 1
|
Free 2
|
Electromechanical Interface 1
|
Prescribed Mesh Displacement 1
|
Linear Elastic Dielectric 1
|
Initial Values 1
|
Fixed Constraint 3
|
Fixed Mesh 2
|
Electric Potential 1
|
Electric Potential 2
|
Electric Potential 3
|
Mesh 1
Parameter name: Vdc
Parameters:
Solution
Name
|
Value
|
Solution
|
Solver 1
|
Component
|
Save Point Geometry 1
|
Data set: Solution 1
Solution
Name
|
Value
|
Solution
|
Store Solution 2
|
Component
|
Save Point Geometry 1
|
Data set: Solution 2
Solution
Name
|
Value
|
Solution
|
Parametric 3
|
Component
|
Save Point Geometry 1
|
Data set: Solution 3
Data
Name
|
Value
|
Data set
|
Solution 3
|
Expression
Name
|
Value
|
Expression
|
emi.freq
|
Unit
|
Hz
|
Description
|
Frequency
|
Global Evaluation 1 (emi.freq)
Table 2
Vdc
|
Frequency (Hz)
|
0
|
1.65862e7
|
20
|
1.65814e7
|
40
|
1.65671e7
|
60
|
1.65431e7
|
80
|
1.6509e7
|
100
|
1.64645e7
|
120
|
1.6409e7
|
140
|
1.63418e7
|
160
|
1.62619e7
|
180
|
1.61681e7
|
200
|
1.60589e7
|
Vdc(11)=200 Eigenfrequency=1.60589e7 Surface: Electric potential (V) Contour: Electric potential (V) Arrow Surface: Displacement field (Material)
Vdc(11)=200 Eigenfrequency=1.60589e7 Surface: Displacement field, X component (µm)