Mechanical Engineering, Indian Institute of
Science, Bangalore 560 012, India
Think big about small things!
ME237
Introduction to MEMS
Jan.-Apr. 2005
Instructor: G. K.
Ananthasuresh, Room 106, ME Building, suresh at
mecheng.iisc.ernet.in
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Homework #2
Assigned: Jan. 11th, 2005
Due: Jan. 18th, 2005
Points: 10
This homework is related to the course project. We will discuss more about
it in the class. One of the three devices introduced in the recitation
class on 7th January, 2005, will be run in parallel to guide you through
your projects.
Please look at Combdrive1.pdf before you
begin to work on this homework.
-
10 points
In the class, we will have a "lucky dip" of MEMS devices and
components.
For the one assigned to you, collect the following information and write
about it briefly. Follow the format used in the
Combdrive.pdf file to the extent possible for your
device/component.
- What is the function of that device/component?
- Who developed it? Give complete references.
- What is the physical/chemical/biological principle of operation?
- Include a picture. Be sure to cite the source of that picture.
- Do a scaling analysis that is relevant to the device/component you
are
looking at.