Homework #3
Assigned: Jan. 18th, 2005
Due: Jan. 25th, 2005
Points: 20

Please look at CombdriveFab.pdf and CombdriveDesLevels.pdf before you begin to work on this homework. Try to follow this format as much as possible. Anything more you do or any better way you will present this will be appreciated and rewarded with extra marks.

1. 10 points
   For the MEMS device/component assigned to you, research the literature and learn about the micromachining process used to make it. And, then submit the following.
   • Verbal description of the process
   • Process flow (step-by-step cross-section figures)
   • Mask layouts for the etching steps (to the extent possible)
2. 10 points
   We discussed the four hierarchical levels of the MEMS design process. Discuss those levels as follows for your device/component. Based on the papers you have read, give quantitative information for each level--again as much as you can do it.
   • System level: Draw a high-level block diagram that describes your device/component idetifying each block. For this, try to ask the pertinent questions at the system level.
   • Device level: Draw the block diagram that describes the dynamics of any one significant moving solid device/component in your case.
   • Physical level: What are the phenomena that are most important to your selected component/device? Write the governing equations if you can. What are the design objectives and constraints that determine the geometry of parts of the component/device?
   • Process level: Is the process chosen for your device/component by the authors of the papers of your device/component justificable? That is, if they used surface micromachining, is that what they should use, or something else? Mention at least one other process to make your selected component/device.