Mechanical Engineering, Indian Institute of
Science, Bangalore 560 012, India
Think big about small things!
ME237
Introduction to MEMS
Jan.-Apr. 2005
Instructor: G. K.
Ananthasuresh, Room 106, ME Building, suresh at
mecheng.iisc.ernet.in
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Homework #7
Assigned: Mar. 17th, 2005
Due: Mar. 24th, 2005
Points: 20
Please download the emdyn files before you begin
to work on this homework.
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20 POints
For the crableg electrostatic drive shown in the figure below, do the
following assuming E = 155 GPa, rho = 2300 kg/m^3.
Obtain the displacement of the shuttle mass as a function of time (using
emdyn files) when DC and AC voltages are applied. Put in damping in a
simplified manner on the shuttle mass using Cuette flow model. Use
parallel-plate approximation for the electrostatic force on the
comb-fingers.
Choose reasonable values of the voltages and frequency of the AC voltage
to run a simulation. But the program is general and will run for any
values.
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20 points
As shown in the figure below, a DC voltage is applied between two
cantilever beams. Find the pull-in voltage using emstatic code as well as
lumped-model, and compare the two. Extra credit of upto 5 "midterm"
points if you obtain pull-in time in the absence of damping both with the
emdyn code and analytical lumped model. Assume the following values.
L1 = 200 um, L2 = 100 um; g = 4 um; Both beams are of uniform
cross-section of rectangular shape, 10 um X 2 um. 2 um is the thickness as
viewed perpendicular to the screen. Assume E = 155 GPa and rho = 2300
kg/m^3.