Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, India
Think big about small things!
ME237 Introduction to MEMS Jan.-Apr. 2005
Instructor: G. K. Ananthasuresh, Room 106, ME Building, suresh at mecheng.iisc.ernet.in
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Homework #7
Assigned: Mar. 17th, 2005
Due: Mar. 24th, 2005
Points: 20

Please download the emdyn files before you begin to work on this homework.

  1. 20 POints
    For the crableg electrostatic drive shown in the figure below, do the following assuming E = 155 GPa, rho = 2300 kg/m^3.
    Obtain the displacement of the shuttle mass as a function of time (using emdyn files) when DC and AC voltages are applied. Put in damping in a simplified manner on the shuttle mass using Cuette flow model. Use parallel-plate approximation for the electrostatic force on the comb-fingers.
    Choose reasonable values of the voltages and frequency of the AC voltage to run a simulation. But the program is general and will run for any values.
  2. 20 points
    As shown in the figure below, a DC voltage is applied between two cantilever beams. Find the pull-in voltage using emstatic code as well as lumped-model, and compare the two. Extra credit of upto 5 "midterm" points if you obtain pull-in time in the absence of damping both with the emdyn code and analytical lumped model. Assume the following values. L1 = 200 um, L2 = 100 um; g = 4 um; Both beams are of uniform cross-section of rectangular shape, 10 um X 2 um. 2 um is the thickness as viewed perpendicular to the screen. Assume E = 155 GPa and rho = 2300 kg/m^3.