Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, India
Think big about small things!
ME237 Introduction to MEMS Jan.-Apr. 2005
Instructor: G. K. Ananthasuresh, Room 106, ME Building, suresh at mecheng.iisc.ernet.in
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Homework #9
Assigned: Apr. 7, 2005
Due: Apr. 13th, 2005
Points: 10

Please look at piezoproblem.pdf before you begin to work on this homework.

  1. 10 points
    A cantilever beam (length = 1000 um, depth = 50 um; width = 10 um) is made of silicon (E = 190 GPa). It has a mass (10 mg) attached to its free end. On the fixed end, there is a thin piezoelectric film of PZT (length along the beam = 10 um; width = 4 um; thickness = 2 um; d = 480E-12 m/V). Compute the voltage generated when this beam is subject to an acceleration of 10g. Neglect the mass of the beam in computing the inertial force.