Introduction to MEMS

Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, India
Think big about small things!
ME237 Introduction to MEMS Jan.-Apr. 2009
Instructors: G. K. Ananthasuresh, Room 106, ME Building, suresh at mecheng.iisc.ernet.in and Rudra Pratap, CranesMEMS Lab, Power Engineering Building, pratap at mecheng.iisc.ernet.in Back to homepage of the course

Homework #3
Assigned: Jan. 22nd, 2009
Due: Jan. 29nd, 2009
Points: 30

Problem 1: 30 points
In this homework, you need to investigate ONE of the following microsystems components/devices/systems and prepare a summary in the format given in a Word document. The Word file is here.
One of the following will be assigned to you in the class>
1. Silcion capacitive accelerometer
2. Piezo-resistive pressure sensor
3. Blood analyzer (lab-on-chip)
4. Conductometric gas sensor
5. Fibre-optic gyroscope
6. surface-acoustic-wave wireless strain sensor
7. Silicon micro-mirror arrays
8. Piezoelectroc inkjet print-head
9. Electrostatic comb-drive
10. Magnetic micro-relay
11. Electro-thermal microactuator
12. A power-on-a-chip system