Mechanical Engineering, Indian Institute of
Science, Bangalore 560 012, India
Think big about small things!
ME237
Introduction to MEMS
Jan.-Apr. 2009
Instructors:
G. K.
Ananthasuresh, Room 106, ME Building, suresh at
mecheng.iisc.ernet.in and
Rudra Pratap, CranesMEMS Lab, Power Engineering Building, pratap at
mecheng.iisc.ernet.in
Back to homepage of the course
Homework #4
Assigned: Feb. 4th, 2009
Due: Feb. 10th, 2009
Points: 30
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Problem 1: 10 points
Consider a parallel-plate capacitor of area A in which one plate
is fixed and the other is restrained by a spring of stiffness k. Take the air gap
between them as g0.
Add an electrical capacitor (a) in series, and (b) in parallel with the parallel-plate capacitor.
Let this electrical capacitance be equal to alpha*(epsilon0*A)/g0. Find
alpha for each case, if possible, such that the stable region of the travel of the moving
plate is g0 before pull-in occurs for increasing values of the applied voltage, V.
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Problem 2: 20 points
Take the above parallel-plate capacitor. Now, consider the mass to be m and damping to be b.
Asume that there is an insulation layer of thickness td of relative permittivity of 5.
(a) Write a program (preferably in Matlab) to compute the pull-in and pull-up voltages and times.
(b) Apply large DC and sufficiently small AC voltages and observe the behavior. By introducing a small perturbation
to the plate after it reaches the steady state and show that the frequency of its natural oscillations due to the perturbation
approaches zero as the DC voltage approaches the pull-in voltage. For extra credit, plot this frequency as a
function of the DC voltage.