Mechanical Engineering, Indian Institute of
Science, Bangalore 560 012, India
Think big abut small things.
ME 237 and NE 211
Mechanics of Microsystems : Micro/nano Mechanics
Aug.-Dec., 2014
Instructor: G. K.
Ananthasuresh, Room 106, ME Building, suresh at
mecheng.iisc.ernet.in
Homework #1
Assigned: Aug. 5th, 2014
Due: Aug. 14th, 2014
Points: 40
-
25 points
Carefully read the paper entitled "A Btach-fabricated Silicon Accelerometer" by Roylance and Angell and then answer
the following questions.
- Compare this accelerometer with any other micromachined accelerometer that came later and comment
on the size, sensitivity, and bandwidth. How was the improvement achieved? Be specific and attach a copy
of the paper that has your other accelerometer.
-
Re-produce the simulated or theoretical parts of any one of the figures among Figs. 6, 7, 8, and 11 in the paper. Include
the equations you used, the code, and the plots.
-
15 points
A simple micromechanical suspension is shown below. It has a mass suspended by two identical beams, the one end
of which is connected to the mass and the end anchored.
Derive its translational stiffness along the x, y, and z directions, from the first principles.
Young's modulus is to be denoted by E.
Choose reasonable numerical values for w, t, l and E to make one of the three translational
stiffness constants to be at least 100 times larger than the other two. Note that l should be at least
10 times or larger than w and t . t should not be more than 25 microns. w
should not be less than 1 micron.