Mechanical Engineering, Indian Institute of
Science, Bangalore 560 012, India
Think big abut small things.
ME 237 and NE 211
Mechanics of Microsystems : Micro/nano Mechanics
Aug.-Dec., 2014
Instructor: G. K.
Ananthasuresh, Room 106, ME Building, suresh at
mecheng.iisc.ernet.in
Homework #3
Assigned: Aug. 28th, 2014
Due: Sep. 9th, 2014
Points: 120
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20 points
Derive Myosotis's six formulae (122368 mnemonic) using Castigliano's theorems.
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20 points
Prove Castigliano's first theorem following the proof of the second theorem given on the Notes page.
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80 points
Design a compliant suspension that fits within the area of 100 microns by 100 microns and with thickness 5 microns.
Its stress should not exceed 1 GPa. It should not have gaps or beams smaller than 5 microns in the plane. Make the in-plane
stiffness along one axis as small as possible and ensure that the cross-axis stiffness about the other in-plane axis
and out-of-plane stiffness and rotational stiffnesses are as large as possible. The proof-mass should be
25 microns by 25 microns or larger in size. Use analytical methods or Matlab finite
element code you have.