Mechanical Engineering, Indian Institute of
Science, Bangalore 560 012, India
Think big about small things!
ME237
Introduction to MEMS
Jan.-Apr. 2005
Instructor: G. K.
Ananthasuresh, Room 106, ME Building, suresh at
mecheng.iisc.ernet.in
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Homework #5
Assigned: Feb. 1st, 2005
Due: Feb. 8th, 2005
Points: 20
Please look at practice5.pdf before you
begin to work on this homework.
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10 points
For the mechanically deforming element in your devie/component, give the
formulae for lumped stiffness (i.e., effective spring constant) and the
first natural frequency. Use appropriate material properties and
dimensions and obtain numerical values. Calculate using meter units and
micron units and get practice as to how to use a commercial numerical
program such as the finite element analysis software.
-
10 points
For the crab-leg suspension shown below, calculate the effective spring
constants in horizontal and vertical in-plane directions (a) analytically
in symbolic form and (b) numerically using the beam-element based FEA
program implemented in Matlab. See the Matlab files below.
Please download the Matlab files and run "beam.m". You need to change the
data in files: node.dat, elem.dat, dispbc.dat, and forces.dat.