Homework #4
Assigned: Sep. 2nd, 2010
Due: Sep. 9th, 2010
Points: 60

• 30 points
  Download the pdf file containing micromechanical suspensions . Obtain three translational and three rotations stiffnesses of suspension #3 (folded-beam suspension) in symbolic form first. Then, substitute the following values and give the numerical answers.
  Y = 159 GPa, nu = 0.25, L = 200 um, w = 1 um, and t = thickness = 2 um.
• 30 points
  14 micromechanical suspension designs are included in micromechanical suspensions file. Now, search the microsystems literature (journal and conference publications and possibly the internet too) and find one that is not here. Describe the use of that suspension and obtain the stiffness that is of significance to that use. Symbolic answers are preferred but you should also substitute numbers to show the order of the stiffness value. Do not forget to give the COMPLETE citation information of the source. Please also provide an abstract sketch such as the one shown in file.