Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, India
Think big abut small things.
ME 237 and NE 211
Mechanics of Microsystems : Micro/nano Mechanics
Aug.-Dec., 2014
Instructor: G. K. Ananthasuresh, Room 106, ME Building, suresh at mecheng.iisc.ernet.in

Books relevant for this course

Primary textbooks

  1. "Microsystem Design" by Stephen D. Senturia, Kluwer Academic Publishers, 2001.
    See the website for this book maintained by the author.
    This is the first book that addresses the modeling and design issues of MEMS. Its author is one of the pioneers of the MEMS field and, more importantly, one who advocated the need for modeling and design since the inception of the field. As we read and learn from this book, we can be assured that we are in good hands.
    Much of the course will use the approach used in this book and the next.
  2. Micro and Smart Systems by G. K. Ananthasuresh, K. J. Vinoy, S. Gopalakrishnan, K. N. Bhat, and V. K. Aatre, Wiley-India, 2010. See the publisher's website .
    We will be using Chapters 2, 4, 5, 6, 9, and 10 of this book. It has worked-out examples and problems at the end of the chapter. Theory and implementation of finite element analysis is included. Coupled simulations are described in detail. It has a chapter on scaling. Its last chapter talks about how various simulation software could be used for modeling MEMS.
To supplement the material covered in the above two books, you will get handouts and reprints of seminal and contemporary papers in the field. There are plenty of books in the field now, which serve as excellent reference books for us. Here are some.

Other textbooks

  1. MEMS & Microsystems: Design and Manufactur by Ta-Ran Hsu, McGraw-Hill, Boston, 2002.
    It has worked-out examples and is good for beginners to follow.
  2. Introductory MEMS: Fabrication and Applications by Thomas M. Adams and Richard A. Layton, Springer, 2010.
    This is a nice book written with care. There are good examples, problems at the end of the chapter, and good discussion of simple modeling techniques.
  3. Introduction to Microsystems Technology: A Guide to Students by Gerald Gerlach and Wolfram Dotzel, Wiley, 2008.
    This too is a decent book written as a textbook with examples and end-of-the-chapter problems.
  4. Scaling Issues and Design of MEMS by Salvatore Baglio, Salvatore Castorina, and Nicolo Savalli, Wiley, 2007.
    This is a nice book to know about scaling-based modeling. Very insightful.

Modeling MEMS and NEMS by John A. Pelesko and David H. Bernstein, Chapman & Hall/CRS, 2003.
It discussed modeling of different physical phenomena well but pays scant attention to actual MEMS applications. Despite "nano" in the title, it include almost nothing about modeling of NEMS. However, it is good in what it covers.

Reference books

  1. Micromachined Transducers Sourcebook by Gregory Kovacs, WCB McGraw-Hill, Boston, 1998, ISBN 0-07-290722-3.
    This is a very comprehensive book and touches upon alomost all application and processing aspects of MEMS until the time it was published, but has very little on modeling design aspects. As its title indicates, it is a great reference book.
  2. Fundamentals of Microfabrication by Marc Madou, CRC Press, 1997, ISBN 0-8493-9451-1.
    This is a great reference for process related details of MEMS. It also covers a number of topics related to fabrication of MEMS devices. It has a chapter on scaling effects at micro scale and has some discussion of modeling.
  3. Micromechanical Transducers: Pressure sensors, accelrometers, and gyroscopes by M.-H. Bao, Elsevier, New York, 2000.
    This book can be considered to be a collection of detailed case-studies on pressure sensors, accelerometers, and gyroscopes. It has the necessary background on these topics.
  4. "Microsystem Technology and Microrobotics" by Sergej Fatikow and Ulrich Rembold, Springer.
  5. Nano- and Microelectromechanical Systems: Fundamanetals of Nano- and Microengineering by Sergey Edward Lyshevski, CRC Press, Boca Raton, Florida, USA.
    This may be useful as a reference book for some modeling.
  6. "Micromechanics and MEMS: Classic and Seminal Papers to 1990. " by William Trimmer, IEEE Press, IEEE Number PC4390, ISBN 0-7803-1085-3, New York.
    As its title indicates, it has a number of early papers in the area.
  7. "Microsensors" by Richard S. Muller, Roger T. Howe, Stephen D. Senturia, Rosemary L. Smith, and Richard M. White, IEEE Press, IEEE Number PC 0257-6, ISBN 0-87942-254-9, New York, 1991.
    This book is compilation of pioneering papers in the MEMS area. A very useful book for those interested when and how exactly the MEMS area took its shape.
  8. Transducers and their Elements by A.D. Khazan, Prentice-Hall, ENglewood Cliffs, NJ
     This is an excellent reference book for refreshing one's knowledge of transduction principles.
  9. Introduction to Microelectromechanical (MEM) Microwave Systems by H.J. De Los Santos, Artech House, Boston, 1999.
     This book is for those interested in MOEMS -- MicroOptoElectroMechanical Systems.