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Topics to be covered in this course--not
necessarily in this order.
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Micromechanical suspensions and their multi-axial stiffness calculations
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Analysis of stretch, compression, bending, and twisting found in micromechanical elements
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Modeling the effects of residual stress and their gradients
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Energy issues: strain energy, potential energy, and kinetic energy; energy methods for quick deformation analysis
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Mechanical properties of MEMS materials
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A detour to finite element analysis; quick theory and a lot of implementation to simulate micromechanical elements
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Lumped modeling of microsystems
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Generalized capacitors, inductors, and resistors; transformers and gyrators
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Circuit models of MEMS
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Modeling magnetic microactors
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Modeling dissipation in MEMS
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Coupled electromechanics
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Electrostatics and capacitance calculations
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Modeling coupling between electrostatic and elastic domains
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Pull-in analysis
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Beam models to study pull-in and beyond pull-in
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Dynamics of electromechanical MEMS
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Fluid damping in MEMS: Cuette flow
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Squeezed-film effects
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Modeling electro-thermal microactuators
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Modeling piezoresitive elements
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Modeling piezoelectric actuators and sensors
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Thermoelastic damping
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Case studies in modeling
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Design case-studies
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