Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, India
Think big abut small things.
ME 237 and NE 211
Mechanics of Microsystems : Micro/nano Mechanics
Aug.-Dec., 2014
Instructor: G. K. Ananthasuresh, Room 106, ME Building, suresh at mecheng.iisc.ernet.in

Course Project

All students in this course are expected to do a project. This will begin after the midterm examination. The aim of the project is to use what is learnt in the course towards simulating or designing a microsystems device. You will know enough by midterm to choose a device. You may need to write your own code (say, in Matlab) or use commercial software.

We will try to do it in phases. It will begin with a one-page project proposal. Stay tuned and wait until the midterm is over.

Remember that project accounts for 25% of the course-grade.

One-page project proposal
Please submit by Oct. 21st, 2014 , a one-page project proposal that should contain the following (includes sketches where applicable but withi one page):

  1. Statement of the problem (one sentence)
  2. Equations to be solved if it is a coding project; details of the device if it is a simulation project; specifications of the problem if it is a design project
  3. Complete information on what you will deliver by the end of the semester

Possible project problems
(The ones in red are taken up by students whose names are indicated against the topic in parentheses.)

  1. Design of a compliant micromechanical suspension to prescribed stiffness and frequency (Shreyash Hadke)
  2. Detailed elastostatic and/or elastosynamic simulation of a micromechanical suspension published in a paper (software may be used)
  3. Improving the 3D beam finite element code (drawing interpolated deformation of each beam element; rectifying the specification of the orientation of the cross-section properties; extending to give mode shapes; etc.) (Mayur Bilrla)
  4. Incorporating residual stress into 2D beam finite element code (Akshay Desai)
  5. Setting up a two degree-of-freedom problem that has multiple stable points for an electrostatically actuated spring-plate system
  6. Extending emstatic code to 3D beam elements (Mahek Mehta)
  7. Extending emdyn code to 3D beam elements
  8. Simulink-based dynamic analysis of an electromechanical devices
  9. Coupled simulation of an electrostatically actuated micro device (software may be used)
  10. Frequency softenng of an electrostatically actuated beam structure (Parameswar Prasad)
  11. Analytical verification of equivalence of Maxwell stress tesor and electrostatic surface force for conductor-air interface; and other interfaces too. (Shuvrangsu Das)
  12. Modifying the beam finite element code to create a lumped model for stiffness and inertia of compliant suspensions (Murugappan R.)
  13. Coding suqeezed-film effects using isothermal Reynolds equation
  14. Including thermal effects into beam finite element codes (2D and 3D) (Great Chayran)
  15. Solving electro-thermal problem using circuit modeling (Matlab)
  16. Simulation of an electro-thermally actuated micromechanical device (software may be used)
  17. Coding anisotropic elastic properties of silicon (C. Santosh Kumar)
  18. Simple Matlab code for piesoresistive elements by extending beam finite element code
  19. Extending the 2D plane electrostatic code to inlcude the dielectrics
  20. Coding thermoelastic damping effects in Matlab (Meera Garud)
  21. Simulink-based dynamic simulation of an accelerometer mounted on an automobile riding over a bumpy road (Safvan P.)
  22. Simulation of contact force in an RF MEMS switch (Subodh Bhosale)
  23. Simulation of switching time in an RF MEMS switch (Abhishek K. A.)
  24. Simulation of gyroscope (Shounak Bhattacharya)
  25. Simulation of a micromachined valve (Rahul Singh Kotesa)
  26. Simulation of a z-axis capacitive accelerometer (P. Krishna Menon)
  27. Simulation of interference modulation by electrostatic actuation (John Thomas)
  28. Simulation of an optomechanical device (Aneesh Dash)
  29. Analytical solution of the linearized isothermal Reynolds equation for OCOC boundary condition and comparing with OOOO boundary condition for a rigid plate (Ishan Dhar)
  30. Coding isothermal Reynolds equation in Matlab and comparing with analytical solution for the OOOO boundary condiiton (Swapnil More)
  31. Developing ANSYS macros for solving isothermal Reynolds equation for OCOC boundary condition (Zacharia)
  32. Simulation of MEMS tunalble capacitor in COMSOL (Mohamed Irfan)

Detailed problem statement
Please submit detailed statement of the problem by Nov. 4th, 2014 , as part of Homework #6.

Project presentations
Each student is expected to make a presentation on his/her project on Nov. 29th, 2014 . The duration of each presentation is 15 min. You also need to submit your PowerPoint presentation file immediately thereafter.

Presentations made by the students (uncorrected)
Name Student name and Topic Presentation file Supplementary files
Abhishek K. A. Simulation of Switching Time in RF MEMS Switches Presentation Files
Akshay Desai Residual stress into 2D beam Code Presentation Files
Aneesh Dash Photoelastic Modulation in MgF2 films Presentation Files
Great Chayran Thermal effects in 2D and 3D FEM Presentation Files
Shreyesh Hadke Design of a Compliant Suspension for Specified Stiffness and Natural Frequency Presentation Files
Irfan Mohamed Simulation of a Tunable Capacitor using COMSOL MultiPhysics Presentation Files
Ishan Dhar Ananlytical Solutions for Squeezed-Film Effects Presentation Files
P. Krishna Menon Design of a Z-axis Differential Capacitive Accelerometer Presentation Files
Mahek Mehta Extending Coupled Electrostatic-elastostatic Matlab Code to 2D Structures Presentation Files
Meera Garud Coding the Effects of Thermoelastic Damping Presentation Files
Mrithyunjay Shukla Simulation of Thermoelastic Damping in Plates - Files
Parameswar Prasad Simulation of Thermoelastic Damping in Plates Presentation Files
P. Safvan Simulink Modeling of an Accelerometer Mounted on a Car Presentation Files
Shounak Bhattacharya Simulink Modeling of a Gyroscope Presentation Files
Shuvrangsu Das Analytical Equivalence of Maxwell Stress Tensor and Surface Electrostatic Force Presentation -
S. K. More Coding Isothermal Reynolds Equation for OOOO Boundary Condition of a Plate Presentation Files
Timothy Zechariah Developing ANSYS Macro for Solving Squeezed-film Effects Presentation Files
C. Santosh Kumar Computing anisotropic elastic properties of silicon Presentation Files
John Thomas Interference modulation by electrostatic actuation Presentation Files
Mayur Birla Modifying 3D beam Code + electrostatic pull-in using the root-locus method in Matlab Presentation Files
P. Murugappan Estimating lumped mass and stiffness of compliant suspensions using 2D FEM beam code Presentation Files
Shraddha Thakur Calculating the pull-in voltages of carbon nanotube wires Presentation -
Subodh Bhosale Contact Force Analysis of MEMS Switches Presentation Files